Integrated thin film resistive sensors for in situ temperature measurements in an acoustic trap

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Werr G, Khaji Z, Ohlin M, Andersson M, Klintberg L, Searle SS, Hjort K, Tenje M

J. Micromech. Microeng. 29 (9) 095003 [2019-09-01; online 2019-07-01]

DOI 10.1088/1361-6439/ab2ac8

Crossref 10.1088/1361-6439/ab2ac8

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