Gallium-tin alloys as a low melting point liquid metal for repetition-pulse-laser-induced high energy density state toward compact pulse EUV sources.

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Andrew Musgrave CS, Lu N, Sato R, Nagai K

RSC Adv. 9 (24) 13927-13932 [2019-04-30; online 2019-05-07]

Here, we show the easy-handling of a liquid gallium-tin alloy (Ga : Sn) as a laser target source for 13.5 nm light generation. The alloys have ∼30 °C freezing points according to a differential scanning calorimetry cooling process. A Nd:YAG laser (1064 nm, 1 ns, 7.1 × 1010 W cm-2) ablated the alloys, obtaining a similar extreme ultraviolet emission intensity to Sn despite a small quantity of Sn. Finally, we demonstrate a liquid metal alloy jet and droplets using a plastic nozzle for high-repetition target supply.

PubMed 35519559

DOI 10.1039/c9ra01905g

Crossref 10.1039/c9ra01905g

pmc: PMC9064005
pii: c9ra01905g