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Thorslund S, Nguyen H, Läräng T, Barkefors I, Kreuger J
J. Micromech. Microeng. 21 (12) 127001 [2011-12-01; online 2011-11-24]
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DOI 10.1088/0960-1317/21/12/127001
Crossref 10.1088/0960-1317/21/12/127001
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