{"entity": "researcher", "timestamp": "2026-08-20T20:36:38.228Z", "family": "De Ferrari", "given": "Fabio", "initials": "F", "orcid": "0000-0003-0960-9931", "affiliations": ["Department of Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas v\u00e4g 10, Stockholm, 100 44, Sweden."], "links": {"self": {"href": "https://publications-affiliated.scilifelab.se/researcher/21be7bf528794d57b0b1431da2a95247.json"}, "display": {"href": "https://publications-affiliated.scilifelab.se/researcher/21be7bf528794d57b0b1431da2a95247"}}, "publications": [{"entity": "publication", "iuid": "09baeb2926c4435d9f51285afdea06bb", "links": {"self": {"href": "https://publications-affiliated.scilifelab.se/publication/09baeb2926c4435d9f51285afdea06bb.json"}, "display": {"href": "https://publications-affiliated.scilifelab.se/publication/09baeb2926c4435d9f51285afdea06bb"}}, "title": "Sub-5 nm Silicon Nanopore Sensors: Scalable Fabrication via Self-Limiting Metal-Assisted Chemical Etching.", "authors": [{"family": "De Ferrari", "given": "Fabio", "initials": "F", "orcid": "0000-0003-0960-9931", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/21be7bf528794d57b0b1431da2a95247.json"}}, {"family": "Raja", "given": "Shyamprasad N", "initials": "SN", "orcid": "0000-0002-2278-1368", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/58df34262ccf4569b54162cfd38525be.json"}}, {"family": "Herland", "given": "Anna", "initials": "A", "orcid": "0000-0002-5002-2537", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/367ed0d139fe4136808b62ee61baa4f0.json"}}, {"family": "Niklaus", "given": "Frank", "initials": "F", "orcid": "0000-0002-0525-8647", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/cbba7fd047e8468288fc79b7b0275ff3.json"}}, {"family": "Stemme", "given": "G\u00f6ran", "initials": "G", "orcid": "0000-0001-9552-4234", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/122f084eea624e5a801c8fafa6d48f6a.json"}}], "type": "journal article", "published": "2025-02-12", "journal": {"title": "ACS Appl Mater Interfaces", "issn": "1944-8252", "volume": "17", "issue": "6", "pages": "9047-9058", "issn-l": "1944-8244"}, "abstract": "Solid-state nanopores offer unique possibilities for biomolecule sensing; however, scalable production of sub-5 nm pores with precise diameter control remains a manufacturing challenge. In this work, we developed a scalable method to fabricate sub-5 nm nanopores in silicon (Si) nanomembranes through metal-assisted chemical etching (MACE) using gold nanoparticles. Notably, we present a previously unreported self-limiting effect that enables sub-5 nm nanopore formation from both 10 and 40 nm nanoparticles in the 12 nm thick monocrystalline device layer of a silicon-on-insulator substrate. This effect reveals distinctive etching dynamics in ultrathin Si nanomembranes, enabling precise control over nanopore dimensions. The resulting nanopore sensor, suspended over self-aligned spheroidal oxide undercuts with diameters of just a few hundred nanometers, exhibited low electrical noise and high stability due to encapsulation within dielectric layers. In DNA translocation experiments, our nanopore platform could distinguish folded and unfolded DNA conformations and maintained stable baseline conductance for up to 6 h, demonstrating both sensitivity and robustness. Our scalable nanopore fabrication method is compatible with wafer-level and batch processing and holds promise for advancing biomolecular sensing and analysis.", "doi": "10.1021/acsami.4c19750", "pmid": "39882662", "labels": [], "xrefs": [{"db": "pmc", "key": "PMC11826499"}], "notes": [], "created": "2026-08-20T08:08:23.883Z", "modified": "2026-08-20T08:08:23.967Z"}, {"entity": "publication", "iuid": "afae2549375b4f92939156b7e6029fe2", "links": {"self": {"href": "https://publications-affiliated.scilifelab.se/publication/afae2549375b4f92939156b7e6029fe2.json"}, "display": {"href": "https://publications-affiliated.scilifelab.se/publication/afae2549375b4f92939156b7e6029fe2"}}, "title": "Cleanroom-Free Direct Laser Micropatterning of Polymers for Organic Electrochemical Transistors in Logic Circuits and Glucose Biosensors.", "authors": [{"family": "Enrico", "given": "Alessandro", "initials": "A", "orcid": "0000-0002-8821-6759", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/637ef7e9c6a14e4597b4304013c988b7.json"}}, {"family": "Buchmann", "given": "Sebastian", "initials": "S", "orcid": "0000-0001-7442-3020", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/5d7fa19b55964898b15740e469f423a8.json"}}, {"family": "De Ferrari", "given": "Fabio", "initials": "F", "orcid": "0000-0003-0960-9931", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/21be7bf528794d57b0b1431da2a95247.json"}}, {"family": "Lin", "given": "Yunfan", "initials": "Y", "orcid": "0000-0002-6560-5209", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/e0a9d5ca176d42eb958ae277ed28062f.json"}}, {"family": "Wang", "given": "Yazhou", "initials": "Y"}, {"family": "Yue", "given": "Wan", "initials": "W"}, {"family": "M\u00e5rtensson", "given": "Gustaf", "initials": "G", "orcid": "0000-0002-6041-4980", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/77d0e449fc994885908cf8c228ce2995.json"}}, {"family": "Stemme", "given": "G\u00f6ran", "initials": "G", "orcid": "0000-0001-9552-4234", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/122f084eea624e5a801c8fafa6d48f6a.json"}}, {"family": "Hamedi", "given": "Mahiar Max", "initials": "MM", "orcid": "0000-0001-9088-1064", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/ea65bd8c3fd642cbbd308e0641a0bc01.json"}}, {"family": "Niklaus", "given": "Frank", "initials": "F", "orcid": "0000-0002-0525-8647", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/cbba7fd047e8468288fc79b7b0275ff3.json"}}, {"family": "Herland", "given": "Anna", "initials": "A", "orcid": "0000-0002-5002-2537", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/367ed0d139fe4136808b62ee61baa4f0.json"}}, {"family": "Zeglio", "given": "Erica", "initials": "E", "orcid": "0000-0002-6428-0633", "researcher": {"href": "https://publications-affiliated.scilifelab.se/researcher/e9f9fe3dcb5e4c9891c6f463c32a1679.json"}}], "type": "journal article", "published": "2024-07-00", "journal": {"title": "Adv Sci (Weinh)", "issn": "2198-3844", "volume": "11", "issue": "27", "pages": "e2307042", "issn-l": null}, "abstract": "Organic electrochemical transistors (OECTs) are promising devices for bioelectronics, such as biosensors. However, current cleanroom-based microfabrication of OECTs hinders fast prototyping and widespread adoption of this technology for low-volume, low-cost applications. To address this limitation, a versatile and scalable approach for ultrafast laser microfabrication of OECTs is herein reported, where a femtosecond laser to pattern insulating polymers (such as parylene C or polyimide) is first used, exposing the underlying metal electrodes serving as transistor terminals (source, drain, or gate). After the first patterning step, conducting polymers, such as poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS), or semiconducting polymers, are spin-coated on the device surface. Another femtosecond laser patterning step subsequently defines the active polymer area contributing to the OECT performance by disconnecting the channel and gate from the surrounding spin-coated film. The effective OECT width can be defined with high resolution (down to 2 \u00b5m) in less than a second of exposure. Micropatterning the OECT channel area significantly improved the transistor switching performance in the case of PEDOT:PSS-based transistors, speeding up the devices by two orders of magnitude. The utility of this OECT manufacturing approach is demonstrated by fabricating complementary logic (inverters) and glucose biosensors, thereby showing its potential to accelerate OECT research.", "doi": "10.1002/advs.202307042", "pmid": "38225700", "labels": [], "xrefs": [{"db": "pmc", "key": "PMC11251563"}], "notes": [], "created": "2026-08-20T06:28:15.482Z", "modified": "2026-08-20T06:28:15.911Z"}]}